Fua mafiafia fa'alavelave mata'utia

Talosaga

Fua le faʻapipiʻiina o ata tifaga, faʻapipiʻi la, tioata sili ona manifinifi, lipine faʻapipiʻi, ata tifaga Mylar, faʻapipiʻi faʻapipiʻi OCA, ma photoresist ma isi.


Fa'amatalaga Oloa

Faailoga o oloa

Pe a faʻaaogaina i le faʻapipiʻiina, e mafai ona tuʻu nei meafaigaluega i tua o le faʻapipiʻi tane ma luma o le ogaumu, mo le fuaina i luga o le initaneti o le mafiafia o le faʻapipiʻiina, ma le fuaina o luga ole laiga o le mafiafia o le faʻamavaeina o ata tifaga, faʻatasi ai ma le maualuga maualuga ma le lautele faʻaoga, aemaise lava mo le fuaina o le mafiafia o le mea manino multi-layer ma le mafiafia manaʻomia i lalo i le nanometer level.

Fa'atinoga o oloa/tulaga

Va'aiga o fua: 0.1 μm ~ 100 μm

Fua sa'o: 0.4%

Fua fai fai: ±0.4 nm (3σ)

Va'aiga ole umi galu: 380 nm ~ 1100 nm

Taimi tali: 5~500 ms

Fuaina nofoaga: 1 mm ~ 30 mm

Toe fa'afo'i o le fua fa'ata'ita'i malosi: 10 nm


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